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G. Eranna Ph.D.

G. Eranna received his M.Sc. Degree in Physics from Sri Venkateswara University, Tirupati (A.P.), India, with top rank in 1978. He got his Ph.D from Indian Institute of Technology (IIT), Madras, in 1985 on Process Modeling of Diffusion in silicon. He was a member of semiconductor device fabrication facilities at IIT Madras where he was involved in the fabrication of semiconductor devices and also worked on molecular beam epitaxy to grow compound semiconductors. Between 1986 and 1991 he was with the Microelectronics Centre, under the Department of E and ECE, of IIT Kharagpur. He joined CEERI in 1991 as a Scientist and presently he is the in-charge for Semiconductor Device Fabrication Facilities and works on nanostructured metal oxides for gas sensing applications. His area of research interest includes: MEMS based micro gas sensors, integrated circuit fabrication technology, CMOS process standardization, solid state micro gas sensors, MEMS devices and nanostructures, and development of micro heaters for on-chip utilities. He has more than 70 publications and contributed a book chapter on metal oxide based micro gas sensors.

Education

M.Sc. Degree in Physics from Sri Venkateswara University, Tirupati (A.P.), India; Ph.D from Indian Institute of Technology (IIT), Madras

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Metal Oxide Nanostructures as Gas Sensing Devices List Price $99.95 / £ Buy with member discount

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