MEMS/NEMS — Publications

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

List Price $249.95 / £159.00 Buy

This textbook, updated and revised and a perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. In its third edition, <span style="font-style: italic;">Fundamentals of Microfabrication</span> includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers. The author characterizes and defines major research areas and illustrates them with examples culled from the most recent literature and from his own work.

Read an exclusive interview with the author of this landmark textbook, Dr. Marc Madou.

Dr. Madou us Chancellor's Professor at UC Irvine, Department of Mechanical and Aerospace Engineering and Department of Biomedical Engineering. He describes his work as not simply as update – but a push to help the U.S. “re-engineer engineering,” by using MEMS nanotechnology to bring manufacturing prowess back to the U.S.

 

The first volume, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology, offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics.

The second volume, Manufacturing Techniques for Microfabrication and Nanotechnology, presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies.

The third volume, From MEMS to Bio-MEMS: Manufacturing Techniques and Applications, focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems.

Metal Oxide Nanostructures as Gas Sensing Devices

List Price $99.95 / £ Buy

With an emphasis on gas (vapor) detection techniques using metal oxide nanomaterials, this book presents the complete list of nanostructured metal oxides and their syntheses. From aluminum to zinc, it analyzes metal oxides and their response to different gaseous (vapor) species. It also analyzes gaseous species from acetic acid to toluene. Numerous tables highlight the synthesis, operating range, responding gases, and response time of various metal oxides. The author details their nanostructures and shapes and explores active devices that use these materials, including future devices and gas sensing arrays such as e-nose.

Manufacturing Techniques for Microfabrication and Nanotechnology

Manufacturing Techniques for Microfabrication and Nanotechnology

List Price $99.95 / £63.99 Buy

Authored by Marc Madou, best-selling author and leading expert in MEMS and manufacturing at the nano scale, this textbook focuses on emerging trends in industrial lithography and pattern transfer. It covers photolithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. The author also explains thermal, electrothermal, and mechanical removing techniques. Designed for chemistry and materials students, it includes extensive references and a comprehensive glossary and provides worked out problems, along with end-of-chapter problems. PowerPoint slides and solutions manual are available for qualifying instructors.

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

List Price $99.95 / £63.99 Buy

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors.

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications

List Price $99.95 / £63.99 Buy

Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download.

Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition

Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition

List Price $97.95 / £61.99 Buy

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.

Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

MEMS and NEMS: Systems, Devices, and Structures

MEMS and NEMS: Systems, Devices, and Structures

List Price $124.95 / £79.99 Buy

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

The MEMS Handbook, Second Edition - 3 Volume Set

The MEMS Handbook, Second Edition - 3 Volume Set

List Price $209.95 / £134 Buy

The new edition of the bestselling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems, their fundamentals (volume one), design and fabrication (volume 2), and applications (volume 3). Written by a team of authors unsurpassed in their experience and standing in the scientific community, this edition includes new chapters on computational methods, polymeric-based micro- and nanosensors and actuators, molecular self-assembly, and the hydrodynamics of small-scale internal gaseous flows. While each volume is available individually, purchased as a set, they come packaged-at a significant cost reduction-in a handsome slip-case.

MEMS: Applications

MEMS: Applications

List Price $104.99 / £66.99 Buy

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.

MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

MEMS: Design and Fabrication

MEMS: Design and Fabrication

List Price $104.95 / £66.99 Buy

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.

MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

MEMS: Introduction and Fundamentals

MEMS: Introduction and Fundamentals

List Price $104.95 / £66.99 Buy

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Micro Electro Mechanical System Design

Micro Electro Mechanical System Design

List Price $164.95 / £105 Buy

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

- Understanding the fabrication technologies that are available - Recognizing the relevant physics involved for micron scale devices - Considering implementation issues applicable to computer aided design - Focusing on the engineering details and the subsequent evaluation testing - Maintaining an eye for detail regarding both reliability and packaging

These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.