CASE Microfabrication Laboratory

CASE Microfabrication Laboratory
Type Disciplines
Research Institution Fabrication
Address Postal Code
Rm. 342, Bingham Bldg.
Case Western Reserve University
44106-7200
City State / Province
Cleveland Ohio
E-mail Country
United States
Web Phone
link (216) 368-0048
Fax
(216) 368-2801

Design, fabrication, integration, and test capabilities for both CMOS & non-CMOS devices.

About the MFL

The Case Microfabrication Laboratory (MFL) is one of the premier academic facilities in the US for the research, development, and prototype fabrication of silicon-based Microelectromechanical Systems (MEMS). The lab is approximately 5500 sq. ft. in size, about half of which is Class 100 cleanroom space. The MFL is professionally staffed and run as an independent cost center under the Electrical Engineering and Computer Science Department.

Visit the Facilities page for more information on the equipment housed in the MFL.

MFL Facilities

The MFL is approximately 5500 sq. ft. in size, about half of which is Class 100 cleanroom space. Click on image below to expand the floorplan of the MFL and explore the different equipment available for processing. You may need to disable your popup blocker for this feature to function. (The floorplan is being updated currently)

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