University of Twente - Transducers Science and Technology TST (MicMec)

University of Twente - Transducers Science and Technology TST (MicMec)
Type Disciplines
Private University Chemistry Engineering Nanomaterials Fabrication Nanomanufacturing
Address Postal Code
Building-45: Hogekamp, floor 7
De Veldmaat 10
7522 NM Enschede
City State / Province
E-mail Country
The Netherlands
Web Phone
link +31 (0)53 489 2751
+31 (0)53 489 3343

In TST research is conducted on four main themes: micromachining, sensors, actuators and fluid handling systems. In all these themes Ph.D. student and Master students are carrying out their projects.

The facilities and cleanroombuilding is pictured above.

The Transducers Science and Technology Group (better known as "MicMec"), conducted by Prof. Dr. Miko Elwenspoek, is part of the MESA+ Research Institute at the University of Twente, The Netherlands. It is one of the leading groups in the world in the field of Micro System Technology (MST). Research is focused on the design and fabrication of Micro Electro Mechanical Systems (MEMS).

The chair Systems and Materials for Information storage (SMI) has joined this chair on 01-01-2007. Information about its research can be found at

Based on photolithography structures can be manufactured with a large variety of functions. Most well-known is Integrated Circuit technology, but quite soon after its invcention people realized that also mechanical structures can be made by photolithography. This technique is now called “micromachining”; the whole field including microelectronics is called Microsystems Technology (MST). When applied for structures with mechanical functions it is called MEMS (microelectromechanical systems). MEMS is the main research issue for the chair of Transducers Science and Technology.

MEMS activities started in the early 1980s and the group in Twente is one of the first active in this field and has contributed significantly to it.

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