Indiana University (Jacobson Research Group)

Indiana University (Jacobson Research Group)
Type Disciplines
Private University Nanomedicine Nanomaterials Nanometrology Nanostructures
Address Postal Code
Department of Chemistry
800 E. Kirkwood Ave.
City State / Province
Bloomington IN
E-mail Country
Web Phone
link (812) 855-6620
(812) 855-8300

The Indiana University (Bloomington) Jacobson Research Group supports a variety of nanscale imaging programs for research and fabrication, including photolithography.

Fabrication of Three-Dimensional Micro- and Nanoscale Features with Single-Exposure Photolithography

A technique for fabricating three-dimensional micro- and nanoscale features using a single photolithographic exposure is used. This method takes advantage of the size-dependent transmission properties of small apertures to produce structures of varying height. Other techniques for 3D fabrication require multiple exposures, special means of exposure, or a gray-tone mask. Using this technique, integrated micro- to nanoscale features can be produced in one step. Feature height is controlled by varying the photomask aperture width and exposure energy.


The NIC anchors a campus effort to investigate the behavior of single molecules and nanostructures, with an emphasis on medical, biological, and materials science applications.

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