Delft University of Technology

Delft University of Technology
Type Disciplines
Research Institution Electronics Nanostructures
Address Postal Code
Faculty of Electrical Engineering, Mathematics and Computer Science 2628 CD DELFT
City State / Province
Mekelweg 4
E-mail Country
The Netherlands
Web Phone
link +31-15-27-86180
Fax
+31-15-27-85922

The Delft Institute for Microelectronics and Submicron technology (DIMES) is dedicated to microelectronics research, with extensive fabrication and test capabilities.

The DIMES Nano Facility was set up to afford DIMES and other researchers a qualitative and flexible opportunity to develop nanostructures. The facility spans the entire spectrum of pattern definition (e-beam and optical, dry and wet etching, deposition, and a broad range of evaluation techniques).

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