Document Actions

Fundamentals of Microfabrication and Nanotechnology - Volume 1

by Editor1 last modified September 13, 2011 - 20:32

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS in a historical context. It also discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.

Click here to get the file

Size 95.6 kB - File type application/pdf