Fundamentals of Microfabrication and Nanotechnology - Volume 1

Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS in a historical context. It also discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.

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