Fundamentals of Microfabrication and Nanotechnology - Volume 3

Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bio-nanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, self-assembly and scaling laws in MEMS and NEMS, actuators, fluidics and miniature devices.

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