Fabrication — Publications

Magnetic Nanoparticles: From Fabrication to Clinical Applications

Magnetic Nanoparticles: From Fabrication to Clinical Applications

List Price $189.95 / £ Buy

Offering the latest information in magnetic nanoparticle (MNP) research, Magnetic Nanoparticles: From Fabrication to Clinical Applications provides a comprehensive review, from synthesis, characterization, and biofunctionalization to clinical applications of MNPs, including the diagnosis and treatment of cancers.

This book is written by some of the most qualified experts in the field, and bridges the gaps between all the different disciplines in this field.

Translational research on tailored magnetic nanoparticles for biomedical applications spans a variety of disciplines, and putting together the most significant advances into a practical format is a challenging task. Balancing clinical applications with the underlying theory and foundational science behind these new discoveries, Magnetic Nanoparticles: From Fabrication to Clinical Applications supplies a toolbox of solutions and ideas for scientists in the field and for young researchers interested in magnetic nanoparticles.

Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics Technical Proceedings of the 2009 NSTI

Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics Technical Proceedings of the 2009 NSTI

List Price $199.95 / £127.00 Buy

These proceedings from the 2009 NSTI Nanotech conference provide the most prestigious forum in the world for leading nano scientists. The papers from the conference have been compiled into three volumes to create the most authoritative and comprehensive compendium available across all of nanotechnology. Including the latest information on industrial development, investments, and ventures, each volume explores cutting-edge research and applications. Volume I covers structures, materials, surfaces, fabrication, nanolithography, characterization, along with various novel applications. This volume also examines worldwide research initiatives and education policies.

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices

Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices

List Price $149.95 / £89.00 Buy

In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices.

Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each step in the CMP process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. They present design techniques using polymeric additives to improve CMP performance. The final chapter focuses on novel CMP slurry for the application to memory devices beyond 50nm technology.


Most books published on CMP focus on the polishing process, equipment, and cleaning. Even though some of these books may touch on CMP slurries, the methods they cover are confined to conventional slurries and none cover them with the detail required for the development of next-generation devices. With its coverage of fundamental concepts and novel technologies, this book delivers expert insight into CMP for all current and next-generation systems.

 

Microoptics and Nanooptics Fabrication

Microoptics and Nanooptics Fabrication

List Price $129.95 / £82.00 Buy

The deep interconnection between micro/nanooptical components and related fabrication technologies—and the constant changes in this ever-evolving field—means that successful design depends on the engineer’s ability to accommodate cutting-edge theoretical developments in fabrication techniques and experimental realization.

Documenting the state of the art in fabrication processes, Microoptics and Nanooptics Fabrication provides an up-to-date synopsis of recent breakthroughs in micro- and nanooptics that improve key developmental processes. This text elucidates the precise and miniaturized scale of today’s fabrication methods and their importance in creating new optical components to access the spectrum of physical optics. It details successful fabrication techniques and their direct effect on the intended performance of micro- and nanooptical components.

The contributors explore the constraints related to material selection, component lateral extent, minimum feature size, and other issues that cause fabrication techniques to lag behind corresponding theory in the development process. Written with the professional optical engineer in mind, this book omits the already well-published broader processing fundamentals. Instead it focuses on key tricks of the trade helpful in reformulating processes to achieve necessary optical targets, improve process fidelity, and reduce production costs.

The contributing authors represent the vanguard in micro-optical fabrication. The result of their combined efforts, this searing analysis of emerging fabrication technologies will continue to fuel the expansion of optics components, from the microwave to the infrared through the visible regime.

 

 

Emerging Lithographic Technologies for Nanopatterning

List Price $149.95 / £79 Buy

As devices become progressively smaller, nanofabrication is increasingly essential for the realization of nanotechnologies that require such structures. Emerging Lithographic Technologies for Nanopatterning reviews conventional and non-conventional technologies for fabricating semiconductor circuits, particularly on microchips. Emphasizing multidisciplinary principles, methodologies, and practical applications, coverage includes emerging techniques for next-generation semiconductor lithography, scanning probe microscope lithography, self-assembly, imprint lithography, and techniques specifically developed for making nanoscale particles, wires, and tubes as well as molecular circuits and devices.

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

List Price $124.95 / £79.99 Buy

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition - Revised chapters that reflect the many recent advances in the field - Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology - In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. - Many more links to the Web - Problem sets in each chapter

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

List Price $124.95 / £79.99 Buy

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition - Revised chapters that reflect the many recent advances in the field - Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology - In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. - Many more links to the Web - Problem sets in each chapter

Fabrication of Silicon Microprobes for Optical Near-Field Applications

Fabrication of Silicon Microprobes for Optical Near-Field Applications

List Price $134.95 / £86 Buy

The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.

Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.