Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set
Marc J. Madou University of California Irvine
This textbook, updated and revised and a perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. In its third edition, <span style="font-style: italic;">Fundamentals of Microfabrication</span> includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers. The author characterizes and defines major research areas and illustrates them with examples culled from the most recent literature and from his own work.
The first volume, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology, offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics.
The second volume, Manufacturing Techniques for Microfabrication and Nanotechnology, presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies.
The third volume, From MEMS to Bio-MEMS: Manufacturing Techniques and Applications, focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems.
Table of ContentsVolume I
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
Historical Note: The Ascent of Silicon, MEMS, and NEMS
Quantum Mechanics and the Band Theory of Solids
Silicon Single Crystal Is Still King
Electrochemical and Optical Analytical Techniques
Manufacturing Techniques for Microfabrication and Nanotechnology
Part I Lithography: Photolithography. Next-Generation Lithographies and Lithography Research.
Part II Pattern Transfer with Subtractive Techniques: Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing.
Part III Pattern Transfer with Additive Techniques: Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques—Thermoforming. Micro-Molding Techniques—LIGA.
From MEMS to Bio-MEMS: Manufacturing Techniques and Applications
Part I From Traditional Manufacturing to Nanotechnology: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared. Nature as an Engineering Guide: Biomimetics. Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared. Packaging, Assembly, and Self-Assembly. Selected Materials and Processes for MEMS and NEMS. Metrology and MEMS/NEMS Modeling.
Part II Scaling Laws, Actuators, and Power and Brains in Miniature Devices: Scaling Laws. Actuators. Power and Brains in Miniature Devices.
Part III Miniaturization Application: MEMS and NEMS Applications.
by gilbertb — last modified October 28, 2011 - 14:24
Reviews"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
—Suman Chakraborty, IIT Kharagpur, India"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland
."… [the new 3-volume format] has the potential to become a "classic" just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"
—Jorg P. Kutter, Technical University of Denmark