Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

Marc J. Madou University of California Irvine
Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set
Publication Type List Price
Textbook $249.95 / £159.00
Publication Date Imprint
03/08/2011 CRC Press
Disciplines ISBN
MEMS/NEMS Nanomaterials 9780849331800
Number of Pages Buy with discount
2640 buy


This textbook, updated and revised and a perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. In its third edition, <span style="font-style: italic;">Fundamentals of Microfabrication</span> includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers. The author characterizes and defines major research areas and illustrates them with examples culled from the most recent literature and from his own work.

Read an exclusive interview with the author of this landmark textbook, Dr. Marc Madou.

Dr. Madou us Chancellor's Professor at UC Irvine, Department of Mechanical and Aerospace Engineering and Department of Biomedical Engineering. He describes his work as not simply as update – but a push to help the U.S. “re-engineer engineering,” by using MEMS nanotechnology to bring manufacturing prowess back to the U.S.


The first volume, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology, offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics.

The second volume, Manufacturing Techniques for Microfabrication and Nanotechnology, presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies.

The third volume, From MEMS to Bio-MEMS: Manufacturing Techniques and Applications, focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems.

Table of Contents

Volume I
Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Historical Note: The Ascent of Silicon, MEMS, and NEMS
Quantum Mechanics and the Band Theory of Solids
Silicon Single Crystal Is Still King
Electrochemical and Optical Analytical Techniques


Volume 2
Manufacturing Techniques for Microfabrication and Nanotechnology

Part I Lithography: Photolithography. Next-Generation Lithographies and Lithography Research.

Part II Pattern Transfer with Subtractive Techniques: Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing.

Part III Pattern Transfer with Additive Techniques: Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques—Thermoforming. Micro-Molding Techniques—LIGA.


Volume 3
From MEMS to Bio-MEMS: Manufacturing Techniques and Applications

Part I From Traditional Manufacturing to Nanotechnology: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared. Nature as an Engineering Guide: Biomimetics. Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared. Packaging, Assembly, and Self-Assembly. Selected Materials and Processes for MEMS and NEMS. Metrology and MEMS/NEMS Modeling.

Part II Scaling Laws, Actuators, and Power and Brains in Miniature Devices: Scaling Laws. Actuators. Power and Brains in Miniature Devices.

Part III Miniaturization Application: MEMS and NEMS Applications.

by gilbertb last modified October 28, 2011 - 14:24
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  • Features recent developments in nano- and micromanufacturing techniques, DNA and protein arrays, fluidics, photonics, and actuators
  • Provides theoretical foundation for understanding the science behind MEMS and NEMS
  • Explores the latest manufacturing techniques, including rapid prototyping and a wide variety of novel nanomanufacturing approaches
  • Offers thorough coverage of Bio-MEMS and Bio-NEMS
  • Contains color illustrations, worked-out example problems, and end-of-chapter problems
  • Solutions manual, PowerPoint lecture slides, and electronic figure files available upon qualifying course adoption.


"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."

—Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."

—Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

."… [the new 3-volume format] has the potential to become a "classic" just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"

—Jorg P. Kutter, Technical University of Denmark