Micro Electro Mechanical System Design

James J. Allen Sandia National Laboratory
Micro Electro Mechanical System Design
Publication Type List Price
Reference $164.95 / £105
Publication Date Imprint
7/8/2005 CRC
Disciplines ISBN
MEMS/NEMS 9780824758240
Number of Pages Buy with discount
496 buy
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It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed.

The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development:

- Understanding the fabrication technologies that are available - Recognizing the relevant physics involved for micron scale devices - Considering implementation issues applicable to computer aided design - Focusing on the engineering details and the subsequent evaluation testing - Maintaining an eye for detail regarding both reliability and packaging

These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.

Table of Contents

  • Introduction. Fabrication Processes. MEMS Technologies. Scaling Issues for MEMS. Design Realization Tools for MEMS. Electro-Mechanics. Modeling and Design.
  • MEMS Sensors and Actuators. Packaging. Reliability. Appendix.


Author 1 Allen, James J., Sandia National Laboratories, Albuquerque, New Mexico, USA
by siebo last modified September 17, 2009 - 12:53
Document Actions


  • - Alerts the MEMS designer to relevant issues that can save time and money on a project
  • - Provides a unified treatment of the course of action to be taken from a product development point of view
  • - Guides the reader through the process in a logical, intuitive manner