Fabrication of Silicon Microprobes for Optical Near-Field Applications
Phan Ngoc Minh Institute of Materials Science, Vietnam Academy of Science and Technology
Takahito Ono Graduate School of Engineering
Esashi Masayoshi Graduate School of Engineering
The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays.
Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of conventional optical fiber probes. The authors have developed a simple, effective method for batch-process production of silicon cantilevered probes with apertures as small as 20 nanometers. They have investigated in detail the probes' optical performance characteristics and show how the silicon probes overcome the limitations of the optical fiber probes in terms of production throughput, optical throughput, reproducibility, simplicity of instrumentation, and mechanical performance.
Table of ContentsIntroduction. Introduction of Near-Field Optics. Introduction of Silicon Micromachining Technology. Fabrication of Silicon Microprobes for Optical Near-Field Applications. Evaluation of the Microfabricated Optical Near-Field Probes. Novel Probes for Locally Enhancing of Near-Field Light and Other Applications. Using Finite Difference Time Domain Method. Sub-Wavelength Optical Imaging with the Fabricated Probes. Optical Near-Field Lithography . Optical Near-Field Recording with the Fabricated Aperture Array. Future Aspect and Conclusions.
ContributorsAuthor 1 Minh, Phan Ngoc, Tohoku University, Sendai, Japan Author 2 Takahito, Ono, Tohoku University, Japan Author 3 Masayoshi, Esashi, Tohoku University, Japan
by siebo — last modified September 15, 2009 - 11:10