MEMS: Introduction and Fundamentals

Mohamed Gad-el-Hak Virginia Commonwealth University
MEMS: Introduction and Fundamentals
Publication Type List Price
Reference $104.95 / £66.99
Publication Date Imprint
11/29/2005 CRC
Disciplines ISBN
MEMS/NEMS 9780849391378
Number of Pages Buy with discount
488 buy
view list


As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field.

MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Table of Contents

Introduction. Scaling of Micromechanical Devices. Mechanical Properties of MEMS. Materials. Flow Physics. Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-electrical domains. Molecular-Based Microfluidic Simulation Models. Hydrodynamics of Small-Scale Internal Gaseous Flows. Burnett Simulations of Flows in Microdevices. Lattice Boltzmann Simulations of Slip Flow in Microchannels. Liquid Flow in Microchannels. Lubrication in MEMS. Physics of Thin Liquid Films. Bubble/Drop Transport in Microchannels. Fundamentals of Control Theory. Model-Based Flow Control for Distributed Architectures. Soft Computing in Control.


Contributor Trimmer, William, Belle Mead Research, Inc., Hillsborough, New Jersey, USA Contributor Kirby, Robert M., University of Utah, Salt Lake City, USA Contributor Beskok, Ali, Texas A&M University, College Station, Texas, USA Contributor Hadjiconstantinou, Nicolas, Massachusettes Institute of Technology, Cambridge, USA Contributor Agarwal, Ramesh K., Washington University, St. Louis, Missouri, USA Contributor Sharp, Kendra V., Penn State University, University Park, Pennsylvania, USA Contributor Breuer, Kenneth S., Brown University, Providence, Rhode Island, USA Contributor Oron, Alexander, Technion, Israel Institute of Technology, Haifa Contributor Chang, Hsueh-Chia, University of Notre Dame, Indiana, USA Contributor Goodwine, J. William, University of Notre Dame, Indiana, USA Contributor Bewley, Thomas R., University of California at San Diego, La Jolla, USA Contributor Stroud, Robert H., The Aerospace Corporation, Chantilly, Virginia, USA Contributor Sharpe, Jr, William N., The Johns Hopkins University, Baltimore, Maryland, USA Contributor Karniadakis, George Em, Brown University, Providence, Rhode Island, USA Contributor Mikulchenko, Oleg, Intel Corporation, Sacramento, California, USA Contributor Mayaram, Kartikeya, Oregon State University, Corvallis, USA Contributor Yun, Keon-Young, Samhonsa Company, Ltd., Seoul, Korea Contributor Adrian, Ronald J., Arizona State University, Tempe, USA Contributor Santiago, Juan G., Stanford University, California, USA Contributor Molho, Joshua I., Stanford University, California, USA Contributor Sen, Mihir, University of Notre Dame, Indiana, USA Editor 1 Gad-el-Hak, Mohamed, Virginia Commonwealth University, Richmond, USA
by siebo last modified September 17, 2009 - 12:57
Document Actions


  • - Provides complete coverage of the fundamental concepts and theoretical underpinnings of MEMS technologies
  • - Emphasizes the physical phenomena that dominate at the microscale
  • - Comprises chapters from leading experts from around the world
  • - Updates existing chapters where necessary and includes two completely new chapters on microscale hydrodynamics and lattice Boltzmann simulations
  • - Includes numerous case studies, examples, figures, and illustrations