MEMS: Design and Fabrication

Mohamed Gad-el-Hak Virginia Commonwealth University
MEMS: Design and Fabrication
Publication Type List Price
Reference $104.95 / £66.99
Publication Date Imprint
11/29/2005 CRC
Disciplines ISBN
MEMS/NEMS 9780849391385
Number of Pages Buy with discount
664 buy
   
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Description

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.

The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.

MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Table of Contents

Introduction. Materials for Microelectromechanical Systems. MEMS Fabrication. LIGA and Micromolding. X-Ray Based Fabrication. EFAB Technology and Application. Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization and Reliability. Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide. Polymer Microsystems: Materials and Fabrications. Optical Diagnostics to Investigate the Entrance Length in Microchannels. Microfabricated Chemical Sensors for Aerospace Applications. Packaging of Harsh Environment MEMS Devices.

Contributors

Contributor Zorman, Christian A., Case Western Reserve University, Cleveland, Ohio, USA Contributor Jia, Guangyao, University of California-Irvine, USA Contributor Cohen, Adam L., Microfabrica Inc., Van Nuys, California, USA Contributor Okojie, Robert S., NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Beheim, Glenn M., NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Atkinson, Gary M., Virginia Commonwealth University, Richmond, USA Contributor Lee, Sang-Youp, Purdue University, West Lafayette, Indiana, USA Contributor Hunter, Gary W., NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Chen, Liang-Yu, Nasa Glenn Research Center, Cleveland, Ohio, USA Contributor Bernstein, Gary H., University of Notre Dame, Indiana, USA Contributor Miwa, Jill Atsuko, University of Quebec, Varennes, Canada Contributor Christenson, Todd, HT MicroAnalytical Inc., Albuquerque, New Mexico, USA Contributor Mehregany, Mehran, Case Western Reserve University, Cleveland, Ohio, USA Contributor McMahon, J. Jay, Rensselaer Polytechnic Institute, Troy, New York, USA Contributor Madou, Marc J., University of California, Irvine, USA Contributor Bang, Christopher A., Micrfabrica Inc., Van Nuys, California, USA Contributor Evans, Laura J., NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Ounaies, Zoubeida, Texas A&M University, College Station, USA Contributor Jang, Jaesung, Purdue University, West Lafayette, Indiana, USA Contributor Wereley, Steven T., Purdue University, West Lafayette, Indiana, USA Contributor Xu, Jennifer C., NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Liu, Chung-Chiun, Case Western Reserve University, Cleveland, Ohio, USA Contributor Makel, Darby B., Makel Engineering, Inc., Chico, California, USA Contributor Lei, Jih-Fen, NASA Glenn Research Center, Cleveland, Ohio, USA Contributor Goodson, Holly V., University of Notre Dame, Indiana, USA Contributor Snider, Gregory L., Notre Dame University, Indiana, USA Contributor Rosei, Federico, University of Quebec, Varennes, Canada Editor 1 Gad-el-Hak, Mohamed, Virginia Commonwealth University, Richmond, USA
by siebo last modified September 17, 2009 - 12:55
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Features

  • - Provides a survey of the materials, fabrication techniques, and technologies used in the design and construction of MEMS
  • - Includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly
  • - Comprises chapters from leading experts from around the world
  • - Updates existing chapters where necessary
  • - Includes numerous case studies, examples, figures, and illustrations