Handbook of Surface and Nanometrology

David J. Whitehouse University of Warwick
Handbook of Surface and Nanometrology
Publication Type List Price
Reference $587 / £309
Publication Date Imprint
12/1/2002 Taylor & Francis
Disciplines ISBN
Nanometrology 9780750305839
Number of Pages Buy with discount
1150 buy
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Description

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples.

Bringing engineering and physics together at the nanoscale reveals some astonishing effects: geometric features such as shape change meaning; roughness can disappear altogether; signals from instruments have to be dealt with differently depending on scale. These and other aspects are dealt with for the first time in this book. It is relevant not only for today's technology but also for future advances. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance and instrumentation. There is a special chapter on nanometrology and this subject permeates the whole book.

The Handbook of Surface and Nanometrology is the only book that covers these subject areas and is the definitive work in this field. This book is indispensable for firms making, trading, and researching semiconductor devices, MEMS, and micro-optics, as well as tradition precision engineering products. It will also be useful in quality control as well as for research scientists, development engineers, and production managers.

Table of Contents

None

Contributors

Author 1 Whitehouse, David J., University of Warwick, Conventry, UK
by siebo last modified March 31, 2008 - 02:40
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Features

  • - Written by a world authority on surface and nanometrology and considered the "Father of Digital Metrology"
  • - Covers surface metrology, nanometrology, and the areas where they overlap and offers a quantitative means of controlling and predicting processes and performance
  • - Explains trends and mechanisms in detail using numerous practical examples
  • - Identifies the unique differences in the physics and engineering at a nanoscale and how to compensate for these differences
  • - Considers aspects of nanotechnology and precision engineering in chapters on manufacture, characterization, standardization, performance, and instrumentation

Reviews



  • "The Handbook of Surface and Nanometrology contains a wealth of information for both practical and research engineers. For Taylor Hobson, the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level."
  • - Bruce Wilson, Taylor Hobson
  • "The book is very useful to the colleagues of my Institute. It will be one of the best books in our library."
  • - Professor Yuri Chugui