Microfabrication and Nanomanufacturing
Mark Jackson
Purdue University
DescriptionNanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market. Table of ContentsMicro- and Nanofabrication, Mark J. JacksonMicrofabrication Using X-Ray Lithography, David W. L. Tolfree and Mark J. Jackson Etching, Machining, and Molding High-Aspect Ratio Microstructures, Mark J. Jackson and Grant M. Robinson The Size Effect in Micromachining, Milton C. Shaw and Mark J. Jackson Mechanical Micromachining, Mark J. Jackson and Sam B. McSpadden Precision Micro- and Nanogrinding, Vellore C. Venkatesh, Sudin Izman, and Mark J. Jackson CVD Diamond Technology for Microtools, NEMS, and MEMS Applications, Waqar Ahmed, Htet Sein, and Mark J. Jackson Laser-Based Micro- and Nanofabrication, Mark J. Jackson and Grant M. Robinson Pulsed Water Drop Micromachining, Mark J. Jackson and Luke J. Hyde Diamond Nanogrinding, Mark J. Jackson, Luke J. Hyde, and Grant M. Robinson Nanometric Machining: Theory, Methods, and Implementation, Kai Cheng, Xun Luo, and Mark J. Jackson Nanocrystalline Diamond: Deposition Routes and Applications, Nasar Ali, Juan Gracio, Mark J. Jackson, and Waqar Ahmed Commercialization Issues of Micro-Nano Technology, David W. L. Tolfree The Future of Micro- and Nanomanufacturing, Mark J. Jackson Index ContributorsContributor Tolfree, David Contributor Shaw, Milton C. Contributor Venkatesh, V.C. (Multimedia University, Melaka, Malaysia); Contributor Ahmed, Waqar (Manchester Metropolitan University, UK); Contributor Cheng, Kai (Brunel University, Middlesex, United Kingdom); Contributor Ali, Nasar (University of Aveiro, Portugal); Contributor Robinson, Grant M. (Purdue University, West Lafayette, Indiana, USA); Contributor McSpadden, Sam B. (Oak Ridge National Laboratory, Tennessee, USA); Contributor Sein, Htet (Manchester Metropolitan University, UK); Contributor Hyde, Luke J. (Purdue University, West Lafayette, Indiana, USA); Contributor Izman, S. (University of Technology Malaysia, Skudai, Johor Durul Ta'zi); Contributor Luo, Xichun (Cranfield University, Bedfordshire, United Kingdom); Contributor Gracio, Juan (University of Aveiro, Portugal); Editor 1 Jackson, Mark J. (Purdue University, West Lafayette, Indiana, USA); |
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