Microfabrication and Nanomanufacturing

Mark Jackson Purdue University
Microfabrication and Nanomanufacturing
Publication Type List Price
Book $144.95 / £92
Publication Date Imprint
11/10/2005 CRC
Disciplines ISBN
Nanomanufacturing 9780824724313
Number of Pages Buy with discount
401 buy
read now
view list


Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels.

The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing.

This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Table of Contents

Micro- and Nanofabrication, Mark J. Jackson

Microfabrication Using X-Ray Lithography, David W. L. Tolfree and Mark J. Jackson

Etching, Machining, and Molding High-Aspect
Ratio Microstructures, Mark J. Jackson and Grant M. Robinson

The Size Effect in Micromachining, Milton C. Shaw and Mark J. Jackson

Mechanical Micromachining, Mark J. Jackson and Sam B. McSpadden

Precision Micro- and Nanogrinding, Vellore C. Venkatesh, Sudin Izman, and Mark J. Jackson

CVD Diamond Technology for Microtools, NEMS,
and MEMS Applications, Waqar Ahmed, Htet Sein, and Mark J. Jackson

Laser-Based Micro- and Nanofabrication, Mark J. Jackson and Grant M. Robinson

Pulsed Water Drop Micromachining, Mark J. Jackson and Luke J. Hyde

Diamond Nanogrinding, Mark J. Jackson, Luke J. Hyde, and Grant M. Robinson

Nanometric Machining:
Theory, Methods, and Implementation, Kai Cheng, Xun Luo, and Mark J. Jackson

Nanocrystalline Diamond: Deposition Routes and Applications, Nasar Ali, Juan Gracio, Mark J. Jackson, and Waqar Ahmed

Commercialization Issues of Micro-Nano Technology, David W. L. Tolfree

The Future of Micro- and Nanomanufacturing, Mark J. Jackson



Contributor Tolfree, David Contributor Shaw, Milton C. Contributor Venkatesh, V.C. (Multimedia University, Melaka, Malaysia); Contributor Ahmed, Waqar (Manchester Metropolitan University, UK); Contributor Cheng, Kai (Brunel University, Middlesex, United Kingdom); Contributor Ali, Nasar (University of Aveiro, Portugal); Contributor Robinson, Grant M. (Purdue University, West Lafayette, Indiana, USA); Contributor McSpadden, Sam B. (Oak Ridge National Laboratory, Tennessee, USA); Contributor Sein, Htet (Manchester Metropolitan University, UK); Contributor Hyde, Luke J. (Purdue University, West Lafayette, Indiana, USA); Contributor Izman, S. (University of Technology Malaysia, Skudai, Johor Durul Ta'zi); Contributor Luo, Xichun (Cranfield University, Bedfordshire, United Kingdom); Contributor Gracio, Juan (University of Aveiro, Portugal); Editor 1 Jackson, Mark J. (Purdue University, West Lafayette, Indiana, USA);
by siebo last modified September 21, 2009 - 08:12
Document Actions


  • Explores the technology of fabrication and manufacturing of engineering materials at the micro- and nanoscale
  • Describes the construction of microscale components using established lithographic techniques and provides examples of LiGA and deep x-ray lithography
  • Focuses on bulk and surface micromachining techniques used for producing features
  • Explains processes for shaping materials to produce mass products and the fabrication of master molds
  • Introduces the concepts of deposition of thin solid films and pulsed water drop machining
  • Contains chapters by internationally renowned experts presenting state-of-the-art information