Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
Marc J. Madou University of California Irvine
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.
A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.
Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.
New in the Second Edition - Revised chapters that reflect the many recent advances in the field - Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology - In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. - Many more links to the Web - Problem sets in each chapter
Table of ContentsLithography. Pattern Transfer with Dry Etching Techniques. Pattern Transfer with Additive Techniques. Wet Bulk Micromachining. Surface Micromachining. KIGA. Comparison of Micromachining Techniques. Micromachine Development and Packaging. Scaling Laws, Actuators, and Power in Miniaturization. Microfabrication Applications.
ContributorsAuthor 1 Madou, Marc J., University of California, Irvine, USA
by siebo — last modified September 15, 2009 - 11:19