PATTERN TRANSFER - SCREAMTo See All Student Forum
PATTERN TRANSFER - SCREAMPosted by jamestest at September 14. 2007
I missed the class on this. Can someone tell me where to get started to catch up? I’m particularly stuck on Question xx from the Problem Set: Use SCREAM to fabricate a capacitive accelerometer. You may rely on the newest deep dry etching technology
Re: PATTERN TRANSFER – SCREAMPosted by saratest at September 14. 2007
Prof. Madou’s Fundamentals of Microfabrication (page 112) shows a cross section of a typical beam made using the SCREAM process is illustrated in step 10. This drawing shows a suspended beam and its associated parallel ...There’s also a chart for wet and dry etching at page 75-77.
I believe Prof Madou may offer a podcast of this class by the end of the week. (link to podcast library)
I found some pretty interesting info on SCREAM patents here. http://www.patentstorm.us/patents/6544863.html. But, the textbook certainly has more up-to-date info.
Our class (mit.edu) will be discussing this Chapter next week, and if there are slides I’d be happy to post it here, as I have my professor’s permission
Thanks to all. This gets me started.