MEMS and NEMS: Systems, Devices, and Structures

Sergey Edward Lyshevski Rochester Institute of Technology
MEMS and NEMS: Systems, Devices, and Structures
Publication Type List Price
Reference $124.95 / £79.99
Publication Date Imprint
1/18/2002 CRC
Disciplines ISBN
MEMS/NEMS 9780849312625
Number of Pages Buy with discount
461 buy
view list


The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.

MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.

The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Table of Contents

Overview and Introduction. New Trends in Engineering and Science: Micro- and Nanoscale Systems. Fundamentals of MEMS Fabrication. Devising and Synthesis of MEMS and NEMS. Modeling of Micro- and Nanoelectromechanical Systems, Devices, and Structures. Nanosystems, Quantum Mechanics, and Mathematical Models. Control of Microelectromechanical Systems. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided Design of MEMS. Index.


Author 1 Lyshevski, Sergey Edward, Rochester Institute of Technology, New York, USA
by siebo last modified September 17, 2009 - 12:27
Document Actions


  • - Advances the theories and frontiers of micro- and nanoelectromechanics
  • - Offers comprehensive coverage of the synergy of fundamental, applied, and experimental research
  • - Focuses on the basic foundations needed to develop high-performance NEMS and MEMS
  • - Provides methods to attain high-fidelity modeling and analysis of NEMS and MEMS
  • - Introduces and illustrates the synthesis and structural classifier concept
  • - Reports on microfabrication technologies, techniques, processes, and materials
  • - Enhances the theory of nanoelectromechanics as the integration of conventional quantum theory and electromechanics


  • "This book … provides an excellent introduction to MEMS and NEMS systems, devices, structures, and fabrication. …its main strength is in the mathematical models derived for the various devices covered in the text. …[It includes] a good overview of practical technology currently in use. …The book is an excellent place to begin studying MEMS and NEMS."
  • -IEEE Electrical Insulation Magazine, Vol. 20, No. 4, July/Aug. 2004