Modeling MEMS and NEMS

John A. Pelesko University of Delaware
David H. Bernstein Independent Consultant, MEMS and Microelectronics
Modeling MEMS and NEMS
Publication Type List Price
Reference $88.95 / £56.99
Publication Date Imprint
11/25/02 CRC
Disciplines ISBN
Modeling 9781584883067
Number of Pages Buy with discount
384 buy
   
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Description

Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates micro- and nanoscale phenomena, and thereby facilitates the design and optimization of micro- and nanoscale devices. Each chapter focuses on a set of devices that share a common feature.

The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices, but also helps develop the intuitive understanding that can lead to new and better designs and devices.

Table of Contents

INTRODUCTION

MEMS and NEMS
A Capsule History of MEMS and NEMS
Dimensional Analysis and Scaling
Exercises

A REFRESHER ON CONTINUUM MECHANICS
Introduction
The Continuum Hypothesis
Heat Conduction
Elasticity
Linear Thermoelasticity
Fluid Dynamics
Electromagnetism
Numerical Methods for Continuum Mechanics

SMALL IS DIFFERENT
The Backyard
Scaling
Systems
Exercises

THERMALLY DRIVEN SYSTEMS
Introduction
Thermally Driven Devices
From PDE to ODE: Lumped Models
Joule Heating of a Cylinder
Analysis of Thermal Data Storage
Exercises

MODELING ELASTIC STRUCTURES
Introduction
Examples of Elastic Structures in MEMS/NEMS
The Mass on a Spring
Membranes
Beams
Plates
The Capacitive Pressure Sensor
Exercises

MODELING COUPLED THERMAL-ELASTIC SYSTEMS
Introduction
Devices and Phenomena in Thermal-Elastic Systems
Modeling Thermopneumatic Systems
The Thermoelastic Rod Revisited
Modeling Thermoelastic V-Beam Actuators
Modeling Thermal Bimorph Actuators
Modeling Bimetallic Thermal Actuators
Exercises

MODELING ELECTROSTATIC-ELASTIC SYSTEMS
Introduction
Devices Using Electrostatic Actuation
The Mass-Spring Model
Modeling General Electrostatic-Elastic Systems
Electrostatic-Elastic Systems - Membrane Theory
Electrostatic-Elastic Systems - Beam and Plate Theory
Analysis of Capacitive Control Schemes
Exercises

MODELING MAGNETICALLY ACTUATED SYSTEMS
Introduction
Magnetically Driven Devices
Mass-Spring Models
A Simple Membrane Micropump Model
A Small-Aspect Ratio Model
Exercises

MICROFLUIDICS
Introduction
Microfluidic Devices
More Fluidic Scaling
Modeling Squeeze Film Damping
Exercises

BEYOND CONTINUUM THEORY
Introduction
Limits of Contiuum Mechanics
Devices and Systems Beyond Continuum Theory
Exercises

REFERENCES

APPENDICES
Mathematical Results
Physical Constants

INDEX
Each chapter also contains Related Reading and Notes sections

Contributors

Author 1 Pelesko; John A. (University of Delaware, Newark, USA) Author 2 Bernstein; David H. (Independent Consultant - MEMS and Microelectronics, Berkeley)
by siebo last modified September 18, 2009 - 09:36
Document Actions

Features

  • Develops the ability to construct, analyze, and interpret mathematical models for microscale devices
  • Constructs a series of models in increasing complexity for a range of thermal, elastic, electrostatic, and magnetically driven devices
  • Clarifies the origins of numerical difficulties and suggests techniques to overcome them
  • Provides additional background material o in an appendix
  • Includes a companion Web site at www.modelingmemsandnems.com that provides a wealth of supplemental material
  • Reviews



    Researchers in MEMS and NEMS
    are likely to find much of interest [in this book],
    and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Graduate students of MEMS and NEMS will find the book to be between useful and indispensable.
    [This] is a thought-provoking book for those with interests in modeling and is likely to have a longevity well beyond the usual half-life of a textbook.
    - SIAM Review, Vol. 46, No. 1

    Although the exposition is primarily intended for the engineering community
    applied mathematicians can also get a lot of inspiration [from this book].
    The large number of exercises makes it suitable
    also as a textbook for graduate students
    .
    - EMS Newsletter


    whether or not the next small thing turns out to be the next big thing, the topic offers interesting science to be explored, and here is a good book to guide you through it.
    very broad scope
    Generous references are given
    Elasticity and heat transfer are perhaps the domains that are most prominent, although there is plenty of insight and interest in other areas, and the choice of core problems is excellent.


    Researchers in MEMS and NEMS, where modeling and simulation are increasingly recognized as important first steps in design, are likely to find much of interest
    and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent.
    Graduate students of MEMS and NEMS will find the book to be between useful and indispensable
    well suited to a graduate course


    The writing style is very clear and lively, producing a readable--even vibrant--text. But above all, it is a thought-provoking book for those with interest in modeling and is likely to have a longevity well beyond the usual half-life of a textbook.
    - SIAM Review, March 2004