Modeling MEMS and NEMS
John A. Pelesko University of Delaware
David H. Bernstein Independent Consultant, MEMS and Microelectronics
Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates micro- and nanoscale phenomena, and thereby facilitates the design and optimization of micro- and nanoscale devices. Each chapter focuses on a set of devices that share a common feature.
The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices, but also helps develop the intuitive understanding that can lead to new and better designs and devices.
Table of ContentsINTRODUCTION
MEMS and NEMS
A Capsule History of MEMS and NEMS
Dimensional Analysis and Scaling
A REFRESHER ON CONTINUUM MECHANICS
The Continuum Hypothesis
Numerical Methods for Continuum Mechanics
SMALL IS DIFFERENT
THERMALLY DRIVEN SYSTEMS
Thermally Driven Devices
From PDE to ODE: Lumped Models
Joule Heating of a Cylinder
Analysis of Thermal Data Storage
MODELING ELASTIC STRUCTURES
Examples of Elastic Structures in MEMS/NEMS
The Mass on a Spring
The Capacitive Pressure Sensor
MODELING COUPLED THERMAL-ELASTIC SYSTEMS
Devices and Phenomena in Thermal-Elastic Systems
Modeling Thermopneumatic Systems
The Thermoelastic Rod Revisited
Modeling Thermoelastic V-Beam Actuators
Modeling Thermal Bimorph Actuators
Modeling Bimetallic Thermal Actuators
MODELING ELECTROSTATIC-ELASTIC SYSTEMS
Devices Using Electrostatic Actuation
The Mass-Spring Model
Modeling General Electrostatic-Elastic Systems
Electrostatic-Elastic Systems - Membrane Theory
Electrostatic-Elastic Systems - Beam and Plate Theory
Analysis of Capacitive Control Schemes
MODELING MAGNETICALLY ACTUATED SYSTEMS
Magnetically Driven Devices
A Simple Membrane Micropump Model
A Small-Aspect Ratio Model
More Fluidic Scaling
Modeling Squeeze Film Damping
BEYOND CONTINUUM THEORY
Limits of Contiuum Mechanics
Devices and Systems Beyond Continuum Theory
Each chapter also contains Related Reading and Notes sections
ContributorsAuthor 1 Pelesko; John A. (University of Delaware, Newark, USA) Author 2 Bernstein; David H. (Independent Consultant - MEMS and Microelectronics, Berkeley)
by siebo — last modified September 18, 2009 - 09:36
Researchers in MEMS and NEMS
are likely to find much of interest [in this book],
and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Graduate students of MEMS and NEMS will find the book to be between useful and indispensable.
[This] is a thought-provoking book for those with interests in modeling and is likely to have a longevity well beyond the usual half-life of a textbook.
- SIAM Review, Vol. 46, No. 1
Although the exposition is primarily intended for the engineering community
applied mathematicians can also get a lot of inspiration [from this book].
The large number of exercises makes it suitable
also as a textbook for graduate students
- EMS Newsletter
whether or not the next small thing turns out to be the next big thing, the topic offers interesting science to be explored, and here is a good book to guide you through it.
very broad scope
Generous references are given
Elasticity and heat transfer are perhaps the domains that are most prominent, although there is plenty of insight and interest in other areas, and the choice of core problems is excellent.
Researchers in MEMS and NEMS, where modeling and simulation are increasingly recognized as important first steps in design, are likely to find much of interest
and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent.
Graduate students of MEMS and NEMS will find the book to be between useful and indispensable
well suited to a graduate course
The writing style is very clear and lively, producing a readable--even vibrant--text. But above all, it is a thought-provoking book for those with interest in modeling and is likely to have a longevity well beyond the usual half-life of a textbook.
- SIAM Review, March 2004