Modeling MEMS and NEMS
John A. Pelesko
University of Delaware
David H. Bernstein
Independent Consultant, MEMS and Microelectronics
DescriptionDesigning small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates micro and nanoscale phenomena, and thereby facilitates the design and optimization of micro and nanoscale devices. Each chapter focuses on a set of devices that share a common feature. The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices, but also helps develop the intuitive understanding that can lead to new and better designs and devices. Table of ContentsINTRODUCTIONMEMS and NEMS A Capsule History of MEMS and NEMS Dimensional Analysis and Scaling Exercises A REFRESHER ON CONTINUUM MECHANICS Introduction The Continuum Hypothesis Heat Conduction Elasticity Linear Thermoelasticity Fluid Dynamics Electromagnetism Numerical Methods for Continuum Mechanics SMALL IS DIFFERENT The Backyard Scaling Systems Exercises THERMALLY DRIVEN SYSTEMS Introduction Thermally Driven Devices From PDE to ODE: Lumped Models Joule Heating of a Cylinder Analysis of Thermal Data Storage Exercises MODELING ELASTIC STRUCTURES Introduction Examples of Elastic Structures in MEMS/NEMS The Mass on a Spring Membranes Beams Plates The Capacitive Pressure Sensor Exercises MODELING COUPLED THERMALELASTIC SYSTEMS Introduction Devices and Phenomena in ThermalElastic Systems Modeling Thermopneumatic Systems The Thermoelastic Rod Revisited Modeling Thermoelastic VBeam Actuators Modeling Thermal Bimorph Actuators Modeling Bimetallic Thermal Actuators Exercises MODELING ELECTROSTATICELASTIC SYSTEMS Introduction Devices Using Electrostatic Actuation The MassSpring Model Modeling General ElectrostaticElastic Systems ElectrostaticElastic Systems  Membrane Theory ElectrostaticElastic Systems  Beam and Plate Theory Analysis of Capacitive Control Schemes Exercises MODELING MAGNETICALLY ACTUATED SYSTEMS Introduction Magnetically Driven Devices MassSpring Models A Simple Membrane Micropump Model A SmallAspect Ratio Model Exercises MICROFLUIDICS Introduction Microfluidic Devices More Fluidic Scaling Modeling Squeeze Film Damping Exercises BEYOND CONTINUUM THEORY Introduction Limits of Contiuum Mechanics Devices and Systems Beyond Continuum Theory Exercises REFERENCES APPENDICES Mathematical Results Physical Constants INDEX Each chapter also contains Related Reading and Notes sections ContributorsAuthor 1 Pelesko; John A. (University of Delaware, Newark, USA) Author 2 Bernstein; David H. (Independent Consultant  MEMS and Microelectronics, Berkeley) 
FeaturesReviewsResearchers in MEMS and NEMS are likely to find much of interest [in this book], and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Graduate students of MEMS and NEMS will find the book to be between useful and indispensable. [This] is a thoughtprovoking book for those with interests in modeling and is likely to have a longevity well beyond the usual halflife of a textbook.  SIAM Review, Vol. 46, No. 1 Although the exposition is primarily intended for the engineering community applied mathematicians can also get a lot of inspiration [from this book]. The large number of exercises makes it suitable also as a textbook for graduate students .  EMS Newsletter whether or not the next small thing turns out to be the next big thing, the topic offers interesting science to be explored, and here is a good book to guide you through it. very broad scope Generous references are given Elasticity and heat transfer are perhaps the domains that are most prominent, although there is plenty of insight and interest in other areas, and the choice of core problems is excellent. Researchers in MEMS and NEMS, where modeling and simulation are increasingly recognized as important first steps in design, are likely to find much of interest and to date there is no other book on MEMS and NEMS that is focused on the modeling process to the same extent. Graduate students of MEMS and NEMS will find the book to be between useful and indispensable well suited to a graduate course The writing style is very clear and lively, producing a readableeven vibranttext. But above all, it is a thoughtprovoking book for those with interest in modeling and is likely to have a longevity well beyond the usual halflife of a textbook.  SIAM Review, March 2004 

