NanoScienceWorks

Description

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology covers all aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. The text offers end-of-chapter problems, worked examples throughout, extensive references, and PowerPoint slides for download, along with a solutions manual for qualifying instructors.

Features

- Lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS

- Presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS

- Covers quantum mechanics, electrochemistry, fluidics, and photonics

- Includes end-of-chapter problems as well as worked-out problems within the text

- Contains extensive references for further reading and a comprehensive glossary of terms

- Offers PowerPoint slides available for download online

- Solutions manual available for qualifying instructors